SiEPIC_EBeam_PDK: process design kit (PDK) for fabrication using electron beam lithography, and a library silicon photonics components.
Project description
SiEPIC_EBeam_PDK
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Developed as part of the SiEPIC program, the SiEPIC EBeam PDK is a process design kit (PDK) for fabrication using electron beam lithography, and a library silicon photonics components.
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Instruction on design, layout, fabrication, test, data analysis for silicon photonics provided in the edX course: Silicon Photonics Design, Fabrication and Data Analysis and textbook Silicon Photonics Design: From Devices to Systems by Lukas Chrostowski and Michael Hochberg.
Download and Installation instructions:
- Details are provided in the Wiki page: Installation instructions. KLayout's package manager is used for both downloading and installing the package into the KLayout Application.
- The PDK may also be installed using pip install siepic_ebeam_pdk
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