secsgem-driver

A production-ready, configuration-driven SECS/GEM driver for semiconductor equipment communication in Python.

Built on the SEMI standards (E4, E5, E30, E37), this library provides a clean async API for connecting to semiconductor manufacturing equipment via HSMS/SECS-II protocols.

Features

• HSMS Protocol (SEMI E37) - Full implementation with active/passive modes, Select/Deselect/Linktest, heartbeat
• SECS-II Codec (SEMI E5) - Complete encode/decode for all data types (List, ASCII, Binary, Boolean, integers, floats)
• Configuration-Driven - YAML-based equipment profiles, no hardcoded message definitions
• Async/Await - Built on Python asyncio for non-blocking I/O
• Auto-Reconnect - Configurable reconnection with backoff
• Event System - Subscribe to equipment events (S6F11) and alarms (S5F1) with decorators
• Type-Safe - Pydantic-validated configuration, typed APIs
• Zero Dependencies on AI/ML - Pure protocol implementation, lightweight enough for any environment

Quick Start

Install

pip install secsgem-driver

Connect to Equipment

import asyncio
from secsgem import SecsGemDriver

async def main():
    driver = SecsGemDriver("configs/amat_centura.yaml")

    await driver.connect()

    # Send S1F1 (Are You There)
    response = await driver.send("S1F1")
    print(f"Equipment: {response}")

    # Send remote command
    await driver.send_command("START", {
        "RECIPE_ID": "ALU_001",
        "LOT_ID": "LOT-2025-001",
    })

    # Subscribe to events
    @driver.on_event(100)  # PROCESS_START
    async def on_process_start(event_data):
        print(f"Process started: {event_data}")

    await driver.disconnect()

asyncio.run(main())

Low-Level HSMS Access

from secsgem import HSMSConnection

connection = HSMSConnection(
    host="192.168.10.101",
    port=5000,
    mode="active",
)

await connection.connect()
reply = await connection.send_data_message(
    stream=1, function=1, wait_bit=True
)
await connection.disconnect()

SECS-II Encoding/Decoding

from secsgem import encode, decode, format_bytes

# Encode Python objects to SECS-II binary
encoded = encode([1, "RECIPE_A", 3.14, True])

# Decode SECS-II binary back to Python
decoded, _ = decode(encoded)

# Pretty-print hex dump
print(format_bytes(encoded))

Equipment Configuration

Define your equipment in YAML - no code changes needed for new equipment types:

equipment:
  id: "CENTURA_001"
  type: "AMAT_CENTURA"
  vendor: "Applied Materials"

connection:
  mode: "active"
  ip_address: "192.168.10.101"
  port: 5000

messages:
  S1F1:
    stream: 1
    function: 1
    wait_bit: true
    description: "Are You There Request"

commands:
  START:
    description: "Start process"
    parameters:
      - name: "RECIPE_ID"
        type: "ASCII"
        required: true

See configs/ for complete examples covering AMAT Centura, Lam Kiyo, TEL Lithius, and a generic template.

Architecture

secsgem-driver
├── hsms.py       # HSMS protocol (TCP, Select/Deselect, Linktest)
├── secs2.py      # SECS-II codec (encode/decode all format codes)
├── config.py     # YAML config loader with Pydantic validation
├── messages.py   # Dynamic message builder from config definitions
└── driver.py     # High-level SecsGemDriver API

The library is designed as a standalone protocol layer. It can be used directly for equipment communication, or as a foundation for higher-level systems like:

• MES (Manufacturing Execution System) integration
• Equipment data collection and monitoring
• Run-to-Run (R2R) process control
• Virtual Metrology (VM) systems
• Fault Detection & Classification (FDC)

Supported SEMI Standards

Requirements

• Python 3.9+
• PyYAML
• Pydantic v2

About

Developed and maintained by MST Semiconductor Technology - building AI-powered semiconductor manufacturing solutions.

This driver powers the communication layer of the NeuroBox E series edge AI platform for semiconductor fabs and equipment manufacturers.

License

Apache License 2.0 - see LICENSE for details.